JPH047656U - - Google Patents
Info
- Publication number
- JPH047656U JPH047656U JP4530290U JP4530290U JPH047656U JP H047656 U JPH047656 U JP H047656U JP 4530290 U JP4530290 U JP 4530290U JP 4530290 U JP4530290 U JP 4530290U JP H047656 U JPH047656 U JP H047656U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film forming
- intake pump
- shape
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 claims 4
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530290U JPH047656U (en]) | 1990-04-28 | 1990-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4530290U JPH047656U (en]) | 1990-04-28 | 1990-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047656U true JPH047656U (en]) | 1992-01-23 |
Family
ID=31559358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4530290U Pending JPH047656U (en]) | 1990-04-28 | 1990-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047656U (en]) |
-
1990
- 1990-04-28 JP JP4530290U patent/JPH047656U/ja active Pending